16:00 - 17:30
| Nano-characterizations in semiconductor’s industry |
SYNOPSIS
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| TT.VI.A.1 |
Giacomo CALLORI
Sapienza University of Rome & LFOUNDRY, Avezzano (AQ)
SRAM fault modeling simulation
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| TT.VI.A.2 |
Iuliana RACHITA
Sapienza University of Rome & LFOUNDRY, Avezzano (AQ)
Characterization of Implanted Si wafer by RAMAN spectroscopy
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| TT.VI.A.3 |
Matteo ANGIOLILLO
Sapienza University of Rome & LFOUNDRY, Avezzano (AQ)
e-PDF capability evaluation for structural analysis of amorphous & nano-crystalline materials in semiconductor industry
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| TT.VI.A.4 |
Mattia MUSOLINO
LFOUNDRY, Avezzano (AQ)
Mercury probe as a tool for prompt oxide characterization in semiconductor industry
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| TT.VI.A.5 |
Narciso GAMBACORTI CV
CEA Leti/PAC-G, Grenoble, France
3D characterization of advanced nanoelectronic devices abst |
Chair: Onofrio Antonino CACIOPPO, LFoundry, Avezzano (AQ)
In collaboration with: LFoundry |
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SYNOPSIS
The requirement of Semiconductor’s industry to manufacture products with ever greater performances and high quality and reliability standards, is an incessant stimulus to individuate and use analytical solutions capable to characterize processes and materials in the early manufacturing process stage. Driving factors for their success are cost and integrability to the production line, in such a way to feedback the manufacturing process. In this context in the session are presented the results of Raman Spectroscopy, e-PDF Analysis and Mercury Probing applications. The individuation of the potential failure modes by fault modeling simulation is presented too since it is powerful application to anticipate or validate failure mechanisms on final products.
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