OXFORD INSTRUMENTS PLASMA TECHNOLOGY
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OXFORD INSTRUMENTS |
Oxford Instruments Plasma Technology
Oxford Instruments Plasma Technology (OIPT) provide etch and deposition process solutions for nanometre sized features, nanolayers and the controlled growth of nanostructures. These solutions are based on core technologies in plasma, ion beam and atomic layer deposition and etch. Products range from clustered cassette-to-cassette platforms for high-throughput production processing to compact stand-alone systems for R&D.
